ANODIZATION DEVICE AND ANODIZATION METHOD

摘要

An anodization device and an anodization method for electrochemically processing a substrate to be processed by using it as the anode and irradiating it with light, enabling the processing of a large-sized substrate to be processed with a smaller-sized constituent element. The electrical contact by with the substrate is effected by a plurality of contact members or by moving a contact member while changing the position. The substrate is so fabricated that the conductive layers of the portions to be processed of the substrate are connected to the respective contact portions of the contact members. The combination of this substrate and the contact members is used to energize only a part of the contact members by means of a switch. Alternatively, the contact members are energized to a part of the conductive layers of the substrate by the movement of the contact members. Thus, the current required for the anodization can be the one required for only a part of the portions to be processed.