MICROSCALE OUT-OF-PLANE ANEMOMETER

摘要

A microscale out-of-plane thermal sensor (10, 100). A resistive heater (12) is suspended over a substrate (14) by supports (16) raised with respect to the substrate to provide a clearance (20) underneath the resistive heater for fluid (22) flow. A preferred fabrication process for the thermal sensor uses surface micromachining and a three-dimensional assembly to raise the support s and lift the resistive heater over the substrate.