Electrophotographic light-receiving member and process for its production

摘要

A process for producing an electrophotographic light-receiving member having a conductive support and a light-receiving member having a photoconductive layer formed on the surface of the conductive support and composed of a non-single crystal material containing silicon atoms as a main component, hydrogen atoms and/or halogen atoms. The photoconductive layer is formed at a flow rate (X) sccm of n Si supply gas and a discharge space volume (Z) cm3 satisfying (A) and a flow rate (X) sccm of the Si supply gas and density (Y) W/cm3 of the electric power input to the discharge space satisfying (B) wherein3x10-3<=X/Z<=1x10-2 (A)and3x10-4<=Y/X<=7x10-4 (B)