Unterdruckspannvorrichtung mit intergrierter elektrischen Prüfungspunkten

摘要

A vacuum chuck with a conductive circuit embedded.onto it's surface wherein the chuck provides a reliable conductive path for electrical testing as well as reliable and uniform mechanical support over the entire area of a flexible panel to be tested. In one possible form, the chuck comprises an air permeable fine grain porous alumina ceramic module having a surface coated with conductive material wherein the coating is thin enough that it does not prevent air from passing through the conductive material or the ceramic module. The conductive material may also be etched or otherwise formed into a conductive pattern to facilitate testing of a panel.