| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin composition for forming an electrically insulative thin film by which a porous and low-dielectric-constant electrically insulative thin film can be formed, a method to efficiently from the porous and low- dielectric-constant electrically insulative thin film on the surface of an electric device, and the porous and low-dielectric-constant electrically insulative thin film. SOLUTION: This resin composition for forming an electrically insulative thin film comprises at least (A) an electrically insulative resin with high energy ray crosslinking property and thermal crosslinking property, (B) a high energy degradable resin, and (C) a solvent. This method is used to apply the composition onto the surface of an electronic device, allow the (C) element to be evaporated partially or entirely and form a film, give a high-energy ray thereto to crosslink the (A) element and decompose the (B) element, and to remove the decomposed substance by heating. Thus, an electrically insulative thin film is formed. COPYRIGHT: (C)2003,JPO
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