| 摘要 |
PROBLEM TO BE SOLVED: To evade a furnace clogging phenomenon, to reject a glass substrate where a crack or a position shift is generated and to stably operate facilities by detecting the crack and the position shift of the glass substrate at the time of carrying the glass substrate in and out of a baking furnace. SOLUTION: A glass substrate transfer device 5a is provided with a transfer hand 1a for delivering the glass substrate 2 on an intra-furnace dedicated carrying plate 3 at the time of carrying the glass substrate 2 in and out of the baking furnace and a thrust-up unit 4 having a thrust-up pin 10 for floating the glass substrate 2 from the intra-furnace dedicated carrying plate 3 at the time of delivering the glass substrate 2. The device is provided with a transmission type optical sensors A-J for detecting the presence/absence of the crack of the glass substrate 2 and the presence/absence of the position shift of the glass substrate 2 to the intra-furnace dedicated carrying plate 3 at the time of elevating and lowering the glass substrate 2 by the thrust-up pin 10. COPYRIGHT: (C)2003,JPO |
