| 发明名称 |
PROBE WITH TRAPEZOIDAL CONTACTOR AND DEVICE BASED ON APPLICATION THEREOF, AND METHOD OF PRODUCING THEM |
| 摘要 |
<p>A probe is disclosed, comprising a beam (4B), which has a front end (4b1), an intermediate portion (4b2) and a base end (4b3), the front end being a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe; and a substantially trapezoidal contactor (4A), which is fixed to the front end (4b1) of the beam.</p> |
| 申请公布号 |
WO03062836(A1) |
申请公布日期 |
2003.07.31 |
| 申请号 |
WO2002JP12984 |
申请日期 |
2002.12.11 |
| 申请人 |
TOKYO ELECTRON LIMITED;HOSAKA, HISATOMI;TAKEKOSHI, KIYOSHI |
发明人 |
HOSAKA, HISATOMI;TAKEKOSHI, KIYOSHI |
| 分类号 |
G01R31/26;G01R1/067;G01R1/073;G01R3/00;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
G01R31/26 |
| 代理机构 |
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| 主权项 |
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