| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To execute nondestructive inspection and measurement of an arbitrary part of a test object regardless the size of the test object, in an inspection device using a scanning electron microscope. <P>SOLUTION: An inspection machine 1 using a scanning electron microscope is used for executing the nondestructive inspection and measurement of an arbitrary part of the test object by using the scanning electron microscope 6a. The inspection machine is provided with a local vacuum formation part 9 for forming a local vacuum region by isolating the circumference of the inspection object part of the test object from the outside air. The inspection machine is so structured that the local vacuum formation part has an exhaust means 15 for executing evacuation for forming a local vacuum region, a lifting means 14 for lifting the entire local vacuum formation part from the test object by jetting a compressed gas to the outer edge part of the local vacuum formation part, and a length measurement means 16 for measuring the distance between the test object and the local vacuum formation part in order to control the lifting of the local vacuum formation part by the lifting means. <P>COPYRIGHT: (C)2003,JPO</p> |
