| 摘要 |
PROBLEM TO BE SOLVED: To evenly and efficiently reduce a metal oxide generated on a metal making an electrode and a wiring of a semiconductor device. SOLUTION: An object 2 to be processed on which a copper oxide is generated is placed in a processing chamber 3 to heat up to a specified temperature with a heater 8. Then, after carboxylic acid stored in a tank 15 is vaporized with a vaporizer 18, the vaporized carboxylic acid and a carrier gas are introduced into the processing chamber 3 through a processing gas supplying piping 16, to reduce the copper oxide of the object 2 to a metallic copper. Thereby a metal oxide is evenly reduced without roughenning a surface of the electrode and the wiring. Further, carbon dioxide and water generated at this time are both in a state of gas, so that impurities are prevented from remaining on a surface of the copper. COPYRIGHT: (C)2003,JPO
|
