| 发明名称 |
Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus |
| 摘要 |
In a linear motor, each arrayed coil unit (160) of a stator yoke (151) is divided into an upper coil (161) and lower coil (162). A cooling pipe (153) is interposed between the upper coil (161) and the lower coil (162).
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| 申请公布号 |
US2003141769(A1) |
申请公布日期 |
2003.07.31 |
| 申请号 |
US20030347862 |
申请日期 |
2003.01.22 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KUBO HIROYOSHI |
| 分类号 |
G12B5/00;G03F7/20;H01L21/027;H02K3/24;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/00 |
主分类号 |
G12B5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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