| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel apparatus capable of stably generating a dense and high temperature plasma column as well as ensuring a prolonged service life of its system. <P>SOLUTION: In an apparatus for generating an extreme ultraviolet ray based on a gas discharge, a backup ionization unit 5 is disposed concentrically in a first electrode case 1, said backup ionization unit having two parallel and approximately flat planar electrodes 52 separated from each other in an axial direction, said planar electrodes being an approximately annular ring, a cylindrical insulator 51 with at least one feeder built-in is disposed between these planar electrodes, thereby causing a slide discharge 61 to occur along an outer surface of the cylindrical insulator 51 when a substantially high voltage is applied across the planar electrode 52, the first electrode case 1 has an outlet 12 narrowed toward a second electrode case 2, and a cylindrical surface 21 of the second electrode case 2 is covered with a tubular insulator 22 at least in a portion thereof adjacent to the narrowed outlet 12 of the first electrode case 1. <P>COPYRIGHT: (C)2003,JPO |
