| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a system for processing the surface of an article uniformly through a simple method by controlling plasma gas standing on the surface of the article. <P>SOLUTION: In the method for processing an article placed on the outside of a plasma generating space by blowing plasma from the plasma blowing nozzle of an electrode structure generating glow discharge plasma by applying a field between a pair of counter electrodes having at least one counter face coated with a solid dielectric and introducing processing gas between the counter electrodes, the angle between the article and the blowing direction of plasma is set in the range of 0-70°. <P>COPYRIGHT: (C)2003,JPO |
