发明名称 ELECTRODE DEVICE
摘要 PROBLEM TO BE SOLVED: To facilitate control of the interval between electrode function sections and the surface of an electrode device in the electrode device. SOLUTION: The electrode device 26 is provided with a container 15, at least the surface of which consists of a corrosion-resistant material, and the electrode function sections 17 and 18 consist of particles packed in the internal space 15g of the container 15. At least a part of the particles consists of a dielectric or conductive material having a specific inductive capacity of≥12. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003218038(A) 申请公布日期 2003.07.31
申请号 JP20020013823 申请日期 2002.01.23
申请人 NGK INSULATORS LTD 发明人 OHASHI HARUAKI;OHASHI TOSHIO;KOBAYASHI HIROMICHI;KATO KOJI
分类号 C23C14/34;C23C16/509;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/205;H01L21/306 主分类号 C23C14/34
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