发明名称 MANUFACTURING APPARATUS FOR LIGHT EMITTING DEVICE, MANUFACTURING METHOD FOR LIGHT EMITTING DEVICE, MANUFACTURING APPARATUS FOR ELECTRONIC DEVICE, ELECTRO- OPTIC DEVICE AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a light emitting device, capable of effectively using a space in facility for installing a manufacturing apparatus, preventing disadvantages due to mutual affect between a plurality of processors and improving the quality of the light emitting device. SOLUTION: This manufacturing apparatus 20 of a light emitting device has conveying devices 21 continuously disposed for conveying a substrate, and a plurality of processors 22 for forming a light emitting element on the substrate. The plurality of processors 22 are disposed separately on both sides of the conveying devices 21. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003217844(A) 申请公布日期 2003.07.31
申请号 JP20020016122 申请日期 2002.01.24
申请人 SEIKO EPSON CORP 发明人 SEKI SHUNICHI;HAYASHI TAKAYUKI
分类号 H05B33/10;G09F9/00;G09F9/30;H01L27/32;H01L51/50;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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