| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a monitor system capable of collecting information showing the operating state and extracting, displaying and analyzing the information collected for storage, or the like at its own timing, for even many mass flow controllers. <P>SOLUTION: This monitor system is provided with a database which is formed by a computer system connected to a mass flow controller having a digital communication function and of which data input-output processing can be synchronously performed, software for data monitoring for performing input processing of the database of mass flow controller operation information, and software for data reading for performing output processing of the database of the mass flow controller operation information. <P>COPYRIGHT: (C)2003,JPO</p> |
