发明名称 WAFER CARRIER DOOR WITH FORM FITTING MECHANISM COVER
摘要 A wafer container (10) and improved door (26). The wafer container door has a latch mechanism cover (44, 46) adapted to retain and guide the latch mechanism components (40, 42). The latch mechanism cover is form fitted to the latch mechanism components and may have apertures (106), creating a cover with an open architecture. The open architecture is of benefit for making the area under the mechanism cover more easily cleanable.
申请公布号 WO03062097(A1) 申请公布日期 2003.07.31
申请号 WO2003US01417 申请日期 2003.01.16
申请人 ENTEGRIS, INC.;EGGUM, SHAWN 发明人 EGGUM, SHAWN
分类号 B65D85/86;H01L21/673;(IPC1-7):B65D85/30 主分类号 B65D85/86
代理机构 代理人
主权项
地址