| 发明名称 |
Deposition of thin films using an infrared laser |
| 摘要 |
This invention pertains to transfer of a solid target material onto a substrate by vaporizing the material by irradiating it with intense light of a resonant vibrational mode of the material and depositing the vaporized material on a substrate in a solid form.
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| 申请公布号 |
US2003143326(A1) |
申请公布日期 |
2003.07.31 |
| 申请号 |
US20020059978 |
申请日期 |
2002.01.29 |
| 申请人 |
BUBB DANIEL;HORWITZ JAMES;CALLAHAN JOHN;HAGLUND RICHARD;PAPANTONAKIS MICHAEL |
发明人 |
BUBB DANIEL;HORWITZ JAMES;CALLAHAN JOHN;HAGLUND RICHARD;PAPANTONAKIS MICHAEL |
| 分类号 |
C23C14/12;C23C14/28;(IPC1-7):C23C16/00 |
主分类号 |
C23C14/12 |
| 代理机构 |
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