发明名称 |
INTERFERENCE LITHOGRAPHY USING HOLEY FIBERS |
摘要 |
A method and apparatus for interference lithography utilize a fiber having a cladding region with axially formed holes surrounding a core region. The fiber emits an optical signal to perform interference lithography. A number of alternative variations in the size and arrangement of axially formed holes produces fibers having characteristics particularly adapted for receiving, communicating, and emitting optical signals for interference lithography. |
申请公布号 |
WO02069051(A3) |
申请公布日期 |
2003.07.31 |
申请号 |
WO2002US06168 |
申请日期 |
2002.02.27 |
申请人 |
OPTICAL SWITCH CORPORATION |
发明人 |
KELSEY, ADAM, F.;LECLERC, MARK, A.;RESLER, DANIEL, P. |
分类号 |
G02B6/02;G02B6/10;G03F7/20 |
主分类号 |
G02B6/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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