发明名称 INTERFERENCE LITHOGRAPHY USING HOLEY FIBERS
摘要 A method and apparatus for interference lithography utilize a fiber having a cladding region with axially formed holes surrounding a core region. The fiber emits an optical signal to perform interference lithography. A number of alternative variations in the size and arrangement of axially formed holes produces fibers having characteristics particularly adapted for receiving, communicating, and emitting optical signals for interference lithography.
申请公布号 WO02069051(A3) 申请公布日期 2003.07.31
申请号 WO2002US06168 申请日期 2002.02.27
申请人 OPTICAL SWITCH CORPORATION 发明人 KELSEY, ADAM, F.;LECLERC, MARK, A.;RESLER, DANIEL, P.
分类号 G02B6/02;G02B6/10;G03F7/20 主分类号 G02B6/02
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