发明名称 X-ray-reflective mirrors exhibiting reduced thermal stress, and X-ray optical systems comprising same
摘要 X-ray-reflective mirrors are disclosed, each including a thermal-transfer device that conducts heat (caused by absorption by the mirror of incident X-ray radiation) away from the mirror without imparting stress to the mirror. As a result, each such mirror exhibits, compared to conventional X-ray-reflective mirrors, reduced deformation and greater thermal stability during use of the mirror. A typical X-ray-reflective mirror is formed from a mirror substrate and has an "effective region" on which X-rays are incident. At least the effective region includes an X-ray-reflective coating (e.g., multilayer coating). Attached to the mirror are thermal-transfer members that function to conduct heat away from the mirror. Each thermal-transfer member is attached to a respective location outside the effective region of the mirror so as not to obstruct reflection of X-rays incident to the effective region. Distal ends of the thermal-transfer members are connected to a suitable cooling mechanism. The thermal-transfer members are configured and dimensioned so as not to impart any significant stress to the mirror.
申请公布号 US2003142785(A1) 申请公布日期 2003.07.31
申请号 US20030353467 申请日期 2003.01.28
申请人 NIKON CORPORATION 发明人 KAGEYAMA MOTOFUSA
分类号 G02B5/08;G02B7/182;G03F7/20;G21K1/06;H01L21/027;(IPC1-7):G01N23/20 主分类号 G02B5/08
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