| 发明名称 |
METHOD AND APPARATUS FOR COMPENSATION OF TIME-VARYING OPTICAL PROPERTIES OF GAS IN INTERFEROMETRY |
| 摘要 |
Methods and systems for compensating a measured optical path length for time−varying optical properties of gas in an interferometer's measurement beam path based on a measurement of the beam propagation direction are disclosed. |
| 申请公布号 |
WO03062739(A2) |
申请公布日期 |
2003.07.31 |
| 申请号 |
WO2003US02168 |
申请日期 |
2003.01.24 |
| 申请人 |
ZYGO CORPORATION;HILL, HENRY, A. |
发明人 |
HILL, HENRY, A. |
| 分类号 |
G01B9/02;G01B11/00;G03F7/20;H01L21/027 |
主分类号 |
G01B9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
