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发明名称
WAFER CARRIER DOOR AND LATCHING MECHANISM WITH HOURGLASS SHAPED KEY SLOT
摘要
申请公布号
AU2003202977(A1)
申请公布日期
2003.07.30
申请号
AU20030202977
申请日期
2003.01.14
申请人
ENTEGRIS, INC.
发明人
SHAWN EGGUM
分类号
H01L21/673;(IPC1-7):B65D85/48
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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