| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving device capable of improving motion accuracy. SOLUTION: In the driving device 120, a base part 126 and a motion part 128 which is arranged oppositely to the base part 126 via a supporting part and performs a relative motion for the base part 126 are provided, the base part 126 includes a guide part on the supporting part side, the motion part 128 includes a guided part on the supporting part side, and the motion part is driven along the base part. The driving device 120 is provided with a compressed air source 146 for supplying compressed air to be driving force for moving the motion part 128 and an air supply passage 160 for driving for applying compressed air from the compressed air source 146 from a blow-off port for driving opened in either one of the base part 126 or the motion part 128 to the base part 126 and the motion part 128 on an opposite side of the base part 126 or the motion part 128 having the opened blow-off port for driving from an oblique direction. COPYRIGHT: (C)2003,JPO
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