MONITORING DEVICE AND ULTRAVIOLET LASER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a monitoring device and an ultraviolet laser device capable of constantly and accurately measuring pulse energy. SOLUTION: The monitoring device detecting the pulse energy of a laser beam 21 having an ultraviolet wavelength is provided with a light quantity sensor 38 measuring the pulse energy of a sample beam 37 obtained by sampling a part of the leaser beam 21 and a sensor 39 for calibration calibrating the light quantity sensor 38 by measuring the pulse energy of the sample beam 37. The device has a shielding means 48 so that the sample beam 37 is not made incident when the sensor 39 for calibration is out of calibration service, and determines timing for calibration based on at least either one of an operating time T of the ultraviolet laser device or a pulse oscillation frequency C of the laser beam 21. The ultraviolet laser device is equipped with the monitoring device. COPYRIGHT: (C)2003,JPO