| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive position sensor having high accuracy and sensitivity. SOLUTION: Two plate capacitors with space, where their capacitors vary when objects mutually move in an effective range along an axis, is formed by constituting first plates (178, 180) and second plates (166, 168, 172, 174). The capacitive position sensor (162) outputs an available output to measure a relative position of the objects along the axis by utilizing the capacitors. COPYRIGHT: (C)2003,JPO
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