| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic laminate which is formed by laminating ceramic substrates varying in the rate of thermal shrinkage from each other and is free of warpage, and a method of manufacturing the same. SOLUTION: Metal alkoxide solution films are formed between dielectric ceramic substrates 11A to 11C and the magnetic material ceramic substrates 13A to 13C so as not to interfere with wiring patterns 12A to 12C, 14A to 14C and thereafter the ceramic substrates 11A to 11C and 13A to 13C are laminated and are heat treated at about 200 to 400°C. A sol-gel reaction is induced in the metal alkoxide solution by this heat treatment and intermediate layers 15 are formed as a result thereof. The ceramic substrates are bonded to each other by these intermediate layers 15. The ceramic substrates are bonded to each other by utilizing the sol-gel reaction of the metal alkoxide solution progressing at the low temperature of about 200 to 400°C and therefore the deformation by the difference in the rates of thermal contraction between the ceramic substrates is prevented and the ceramic laminate 10 free of the warpage and peeling can be obtained. COPYRIGHT: (C)2003,JPO |
