| 摘要 |
PROBLEM TO BE SOLVED: To provide a Fabry-Perot filter which is free of curvature of a movable mirror, has a wide optical active area, can easily control an inclination of the movable mirror, and is easy to manufacture. SOLUTION: The Fabry-Perot filter which has a fixed mirror and the movable mirror has a fixed substrate where the fixed mirror is formed, an optical fiber for incidence which is installed in a groove formed on the fixed substrate almost up to the fixed mirror, a movable substrate which is connected to the fixed substrate across a spacer, a conductive diaphragm which is formed thinly by etching the movable substrate in a rectangular groove shape, a projection part which is formed thinly in a place where the movable substrate is surrounded with the diaphragm and has the movable mirror formed, and a fixed electrode which is formed on the fixed mirror and arranged opposite the diaphragm; and a gap is varied by driving the movable substrate with an electrostatic force generated by applying a driving voltage between the fixed electrode and diaphragm. COPYRIGHT: (C)2003,JPO |
