| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength scattering fluorescent X-ray analyzer that can be shortened in evacuating time required for starting measurement while the size of the analyzer is reduced. SOLUTION: At the time of exchanging samples, a spectroscopic chamber 7 and an X-ray irradiating chamber 5 are set to measurement starting vacuums by switching stop valves 23 and 24 after a sample chamber 2 is set to a measurement starting vacuum by means of a single vacuum pump 18 in a state where the shutter 15 between the sample chamber 2 and X-ray irradiating chamber 5 is closed. Thereafter, the shutter 15 is opened. COPYRIGHT: (C)2003,JPO
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