| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a rotary joint for allowing miniaturization, and preventing mixing of a particle in a processing fluid flowing inside. <P>SOLUTION: This rotary joint 25 has a tubular stator 43, and a tubular rotor 44. The stator 43 includes a body 47, an inner cylinder part 45 projecting from the body 47, an outer cylinder part 46 coaxially arranged with the inner cylinder part 45 around the inner cylinder part 45 by projecting from the body 47, and a leak port 57 for leaking the inside fluid. The rotor 44 has a cylindrical part 50. First clearance 52 is formed between the inner cylinder part 45 and a cylindrical part 50, and second clearance 53 is formed between the outer cylinder part 46 and the cylindrical part 50. A sealing ring 64 including, a pressure contact member 64a and a coil spring 64b is arranged in the second clearance 53. The leak port 57 communicates with the second clearance 53 in the vicinity of the sealing ring 64. <P>COPYRIGHT: (C)2003,JPO</p> |
