METHOD OF FORMING FINE PARTICLE, FINE PARTICLE FORMING SYSTEM, THIN FILM DEPOSITION METHOD, THIN FILM DEPOSITION SYSTEM FINE PARTICLE, THIN FILM AND PLANAR SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide fine particles formed so that the size and distribution thereof are controlled independently of their physical properties, to provide a thin film containing the fine particles, to provide a planar system containing the thin film, and to provide a method and system for producing these. SOLUTION: In a process where a gaseous starting material is cracked by glow discharge to deposit fine particles on a base board 11, the size of the fine particles deposited on the substrate is controlled by the voltage to be applied to the base board 11 or a base board holder 12 having electrical conductivity. COPYRIGHT: (C)2003,JPO