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发明名称
INTEGRATED PHASE SEPARATOR FOR ULTRA HIGH VACUUM SYSTEM
摘要
申请公布号
EP1330561(A2)
申请公布日期
2003.07.30
申请号
EP20010971298
申请日期
2001.09.21
申请人
APPLIED EPI, INC.
发明人
COLOMBO, PAUL, E.
分类号
B01J3/00;B01J3/02;C23C14/28;C30B23/02;F04B37/08;H01L21/203;(IPC1-7):C30B23/02;F25J1/02
主分类号
B01J3/00
代理机构
代理人
主权项
地址
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