| 摘要 |
PROBLEM TO BE SOLVED: To improve the use efficiency of illumination light of a multi-exposure drawing device. SOLUTION: The multi-exposure drawing device is provided with a light source unit 22, four fiber bundles 241, 242, 243, and 244 which are optically connected to a plurality of exposure units, and an optical path changing device 23. The optical path changing device 23 is provided with a rotary disk 231, and a 1st reflecting mirror 235 and a 2nd reflecting mirror 237. The rotary disk 231 is rotated by a motor 239 at a fixed speed and the illumination light from the light source unit 22 is distributed to one of the fiber bundles 241, 242, and 243 according to the rotational position of the rotary disk. COPYRIGHT: (C)2003,JPO
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