| 摘要 |
PROBLEM TO BE SOLVED: To provide a precise defect-part detection method for an inspection object in which a binarization threshold value dealing with even a fluctuation in a condition (illumination brightness or the like) in an imaging operation of the inspection object is calculated. SOLUTION: An image 11 by image data is divided into a plurality of small regions 11a and so on. On the basis of at least one from among the minimum luminance and the maximum luminance of the small regions 11a and so on, the binarization threshold value is set. A defect part 13 and a defect part 14 in the inspection object are detected by the binarization threshold value based on the image data obtained by imaging the inspection object. COPYRIGHT: (C)2003,JPO
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