| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for crystallizing a very small amount of solution arranged on the prescribed position on a substrate. SOLUTION: Liquid droplets of the solution in which a thin film forming material are arranged on the substrate by ejecting the solution by a ink-jet method. Crystalline nuclei are produced in the solution by controlling a partial pressure of a gas having the same component as that of the solvent in the vicinity of the liquid droplets just after being arranged to a value equal to or almost equal to the saturated vapor pressure, for example. After the crystalline nuclei are produced, the partial pressure of the gas in the vicinity of the liquid droplets is lowered to 1/10 to 1/100 of the saturated vapor pressure, for example. Solution containing the thin film forming material of such an amount that the concentration when ejected becomes≥1/10 of the saturated concentration is used as the solution. COPYRIGHT: (C)2003,JPO
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