DEVICE AND METHOD OF ANODIC FORMATION

摘要

PROBLEM TO BE SOLVED: To process a large sized substrate to be processed by using smaller components in an anodic formation device and an anodic formation method for processing the substrate to be processed by using the substrate as an anode and electrochemically processing the substrate by irradiating it with light.

SOLUTION: The electric contact of a contact member with the substrate to be processed is given by either a plurality of contact members or positional changes of a contact member. The substrate to be processed is preliminarily manufactured so that every partial electrically conductive layer of the portion to be processed is connected to the contact part of a plurality of contact members. The electric current necessary for processing is saved by limiting it to an amount which corresponds to a part of the portion to be processed by using a combination of the substrate to be processed and the contact members, and by either energizing only a part of contact members through a change over switch or energizing the contact member in a way that the energizing is given to a part of the electrically conductive layer of the substrate to be processed by moving the contact member.

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