| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form a metallic film pattern having excellent adhesion only on a required region even to a substrate having a smooth surface by a simple process. <P>SOLUTION: A photosensitive film containing a first catalyst is formed on a substrate (first stage). The photosensitive film is formed into a prescribed pattern (second stage). A metallic oxide film (such as a ZnO film) is selectively formed on the first catalyst subjected to the patterning by a wet film forming technique. A layer (second catalytic layer) being a catalyst of electroless plating is formed on the metallic oxide film (fourth stage). The substrate is dipped into an electroless plating bath, and a metallic film is deposited on the metallic oxide film (fifth stage). <P>COPYRIGHT: (C)2003,JPO</p> |
