COMPARATOR, SEMICONDUCTOR TEST DEVICE, SEMICONDUCTOR TEST METHOD, AND SEMICONDUCTOR MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor test device having such a comparator that the operation speed is fast, and that the fluctuation of leakage current is little. SOLUTION: The semiconductor test device has the comparator which logically judges a voltage of a responded waveform from a semiconductor apparatus, and an input section of the comparator has an input buffer circuit and a pseudo input buffer circuit which generates quantities of leakage current identical to that from the input buffer circuit. Therefore, the operation speed of the comparator is made fast, and the fluctuation of the leakage current is made little. COPYRIGHT: (C)2003,JPO