| 摘要 |
PROBLEM TO BE SOLVED: To provide an instrument and a method that can accurately measure the electrostatic capacity of a measuring object. SOLUTION: This capacity measuring instrument 1 is provided with a signal generating circuit 13 for generating a measuring signal SM<SB>1</SB>for measuring the electrostatic capacity of the measuring object 2, a detecting circuit 11 having a resistance R connected in series to the measuring object 2 to detect a both-end voltage generated between the both ends of the resistance R when the measuring signal SM<SB>1</SB>is supplied to the measuring object 2, and a CPU 14 for measuring the electrostatic capacity of the measuring object 2, based on the detected both-end voltage and the supplied voltage of the measuring signal SM<SB>1</SB>. The signal generating circuit 13 is provided with the CPU 14 constituted to make a frequency of the measuring signal SM<SB>1</SB>variable and for controlling variably the frequency of the measuring signal SM<SB>1</SB>to the signal generating circuit 13 to settle the both-end voltage within a prescribed voltage range. COPYRIGHT: (C)2003,JPO
|
