| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting inspection device with laser repair function capable of confirming a defect position to perform a defect repair and performing a propriety judgement including various unevennesses and the like. SOLUTION: In this device, a light source, an optical system and a laser are successively arranged on the reverse side of a panel fixed to and held by a stage. Accordingly, a lighting inspection capable of observing the lighting state from the surface side of the panel can be performed, and the laser repair can be performed from the reverse side of the panel. COPYRIGHT: (C)2003,JPO
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