| 发明名称 |
ALUMINUM NITRIDE SINTERED COMPACT AND CERAMIC SUBSTRATE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact which has excellent mechanical strength and in which the dropping out of ceramic particles from the surface and the side surface and the generation of particles are prevented. <P>SOLUTION: The aluminum nitride sintered compact is characterized in that the sintered compact contains sulfur. <P>COPYRIGHT: (C)2003,JPO |
| 申请公布号 |
JP2003212658(A) |
申请公布日期 |
2003.07.30 |
| 申请号 |
JP20020316514 |
申请日期 |
2002.10.30 |
| 申请人 |
IBIDEN CO LTD |
发明人 |
HIRAMATSU YASUJI;ITO YASUTAKA |
| 分类号 |
H05B3/20;C04B35/581;H01L21/68;H01L21/683;H05B3/10;H05B3/74 |
主分类号 |
H05B3/20 |
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