| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for the inspection of a defect with reference to a film wherein the defect can be inspected quickly and with high accuracy from the film in which fillers such as particles or the like exist and information on the inspection of the defect is recorded or attached so as to be provided as a filmlike product and to provide the filmlike product. SOLUTION: Detection optical systems of two systems as an oblique illumination system and an incident illumination system are provided with reference to a filmlike inspection object in which the fillers such as the particles or the like having different optical characteristics exist, an irradiation angle of illumination light and a wavelength of the illumination light are selected, a difference in a shading degree between the defect and the fillers existing in the film is detected on the basis of an imaged image, the defect is discriminated on the basis of the difference, a defect kind, a defect size and detection coordinates of the defect are recorded or attached as a detection result, and the quality control of the filmlike product is improved so as to increase its added value. COPYRIGHT: (C)2003,JPO
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