| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid material vaporizing apparatus capable of reducing generation of non-vaporized residues and improving the vaporizing efficiency. SOLUTION: A nozzle 2 to spray a liquid material and a nozzle 3 to spray a cleaning solution or an organic solvent are provided on a chamber body 4a in the direction facing each other at right angles. The liquid material vaporizing apparatus comprises a vaporizing chamber 4 comprising the chamber body 4a and a flange 4b to form a vaporizing surface S, and a temperature control system 9 to control the temperature of its inner circumferential surface. The liquid material sprayed from the nozzle 2 absorbs the thermal energy in the inner circumferential surface mainly consisting of the vaporizing surface S, and is converted into the vaporized gas, the residual gas and residues generated at the same time are removed by spraying the cleaning solution from the nozzle 3, vaporization is promoted by spraying the organic solvent and the vaporizing efficiency is improved thereby. COPYRIGHT: (C)2003,JPO
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