| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power-saving type gas sensor where the concentration of gas can be quickly detected, and further durability in a heater is superb. <P>SOLUTION: The gas sensor has an electrical heating element thin film 10, a heat-resistant insulating thin film 11, and a heat-resistant gas sensitive film 12 that are laminated from a lower section in this order at the upper section of a glass insulating heat-resistant substrate 9. Then, in the electrical heating element thin film 10, a power value that is raised in a step by a DC power supply 8 is supplied pulsively, thus raising temperature in a step where the temperature rise is gentle, reducing thermal shock, and hence achieving durable reliability. <P>COPYRIGHT: (C)2003,JPO |
