| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for treating a board capable of preventing an excess metal contamination from being stored in a treatment liquid while recycling the treatment liquid. <P>SOLUTION: The apparatus for treating the board supplies the treatment liquid to a surface of the board W and treats the board W. The apparatus comprises a treatment liquid tank 4 for constituting a circulating route formed to supply the treatment liquid to the board W, to circulate the treatment liquid used to treat the board W and to be able to recycle the treatment liquid so as to treat the board, a treatment liquid supply passage 10 and a treatment liquid recovering passage 12. A metal contaminant amount of the treatment liquid passing through the passage 10 is measured by a metal contamination amount measuring unit 40. When the measured amount exceeds a predetermined set value, a pure water supply valve 15, a chemical supply valve 16 and a liquid discharge valve 17 are controlled by an operation of a controller 30, and the liquid is automatically replaced. Further, an alarm by an alarm unit 50 is generated. <P>COPYRIGHT: (C)2003,JPO</p> |
