METHOD FOR PRODUCING OPTICAL WAVEGUIDE ELEMENT

摘要

PROBLEM TO BE SOLVED: To produce an optical waveguide element which suppresses optical damage due to impurities and has high reliability by diminishing impurities present in a crystal substrate.

SOLUTION: An ion exchange layer 11 is formed on the surface of an optical crystal substrate 10 and the layer 11 is removed by wet etching with hydrofluoric acid. An optical waveguide 18 and a plurality of polarizing reversal layers 15 which cut periodically across the optical waveguide are then formed on the surface of the substrate 10.

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