| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for forming a thin film by using a raw material fluid obtained by mixing a film forming raw material with a fluid or a liquid in a supercritical state. SOLUTION: The raw material fluid in which a condensation polymer consisting of a composition element of metal oxide intended for formation, alcohol, and fluid or liquid carbon dioxide in the supercritical state are mixed is fed to the apparatus for forming the thin film. The apparatus includes a substrate holder 2 to hold a substrate 3 a film forming chamber 1 to accommodate the substrate holder, a feeding mechanism to feed the raw material fluid on a substrate surface and a lamp heater 4 to heat the substrate 3 held on the substrate holder 2. The thin film is formed by using the raw material fluid obtained by mixing the film forming raw material with the fluid or the liquid in the supercritical state. COPYRIGHT: (C)2003,JPO
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