| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dielectric barrier discharge apparatus for reducing a perfluorocompound. <P>SOLUTION: The dielectric barrier discharge apparatus comprises a housing, a 1st dielectric tube, a second dielectric tube, and at least one electrode. The 1st dielectric tube is disposed in the housing, and a 1st cooling-gas passage is formed between the housing and the 1st dielectric tube. The 2nd dielectric tube is disposed in the 1st dielectric tube, and a perfluorocompound passage is formed between the 1st and 2nd dielectric tubes to introduce the perfluorocompound gas into the perfluorocompound passage, and a 2nd cooling- gas passage connected to the 1st cooling gas passage is formed. The electrode is disposed in the housing, and ionizes perfluorocompound gas by introduction of dielectric energy and generates plasma. Cooling gas is introduced in the cooling-gas passage to cool the electrodes. <P>COPYRIGHT: (C)2003,JPO</p> |
