摘要 |
A MOSFET that provides high current conduction at high frequency includes a deposited layer over a substrate of a first conductivity type, with source and drain regions adjoining a top surface of the epitaxial layer. The drain region has a first portion that extends vertically through the epitaxial layer to connect to the substrate and a second portion that extends laterally along the top surface. A first region is disposed in the epitaxial layer between the extended region and the source region. An insulated gate is located above the first region between the source region and the second portion of the drain region. A drain metal layer contacts a bottom surface of the substrate, and a source metal layer that substantially covers the top surface connect to the source region.
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