| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To shorten machining time by shortening the moving time of an X-Y stage. <P>SOLUTION: In machining a multiplicity of machining positions scattered on a work by performing the positioning by the X-Y stage by a step and repeat using a galvanoscanner movable at a high speed within prescribed scanning areas and the X-Y stage movable beyond the scanning areas then performing the positioning by the galvanoscanner, the arrangement of such scanning areas that the scanning areas absent of the machining positions do not exist and that the moving quantity of the X-Y stage is reduced while the progressing direction of the X-Y stage is restricted in the coordinate axial direction thereof is determined. <P>COPYRIGHT: (C)2003,JPO</p> |
