REFINING METHOD USING ULTRA-SHORT PULSE LASER AND WORKPIECE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method for easily and surely achieving refining at nano level.

SOLUTION: A low-fluence ultra-short pulse laser beam (femtosecond laser beam) is applied to the surface of a solid material as it is controlled for polarization, to form a fine structure whose size is smaller than the wavelength of the laser beam applied. The ultra-short pulse laser beam is applied to the surface of the solid material as it is linearly polarized to enable formation of a fine structure consisting of elongate protrusions along a direction perpendicular to the direction of the polarization; by circularly polarizing the laser beam during its application, a fine structure consisting of granular protrusions can be formed. The size of such fine structures is positively correlated with the wavelength of the laser beam applied; by selecting the wavelength the size of the fine structure can be controlled.

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