发明名称 CUTTING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a cutting device preventing cutting water splashed during a cutting work from sticking to a light emitting part and a light receiving part of a cutting blade detector and enabling the cutting blade detector to constantly precisely detect the state of the cutting blade. <P>SOLUTION: This cutting device is provided with a chuck table retaining a workpiece, a cutting mechanism having the cutting blade for cutting the workpiece retained by the chuck table, and the cutting blade detector having the light emitting part and the light receiving part for detecting the state of the cutting blade. The cutting blade detector 94 is provided with a protective cover mechanism 94 selectively covering the light emitting part 902 and the light receiving part 903. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003211354(A) 申请公布日期 2003.07.29
申请号 JP20020009759 申请日期 2002.01.18
申请人 DISCO ABRASIVE SYST LTD 发明人 OMIYA NAOKI
分类号 B23Q11/08;B23Q17/09;B23Q17/24;B24B27/06;B24B49/10;H01L21/301;(IPC1-7):B24B49/10 主分类号 B23Q11/08
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